Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties.

نویسندگان

  • Wuxia Li
  • J C Fenton
  • Ajuan Cui
  • Huan Wang
  • Yiqian Wang
  • Changzhi Gu
  • D W McComb
  • P A Warburton
چکیده

We report that, to enable studies of their compositional, structural and electrical properties, freestanding individual nanoobjects can be selectively felled in a controllable way by the technique of low-current focused-ion-beam (FIB) milling with the ion beam at a chosen angle of incidence to the nanoobject. To demonstrate the suitability of the technique, we report results for zigzag/straight tungsten nanowires grown vertically on support substrates and then felled for characterization. We also describe a systematic investigation of the effect of the experimental geometry and parameters on the felling process and on the induced wire-bending phenomenon. The method of felling freestanding nanoobjects using FIB is an advantageous new technique enabling investigations of the properties of selected individual nanoobjects.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

The field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling

High aspect ratio diamond nanocone arrays are formed on freestanding diamond film by means of focused ion beam (FIB) milling technology and hot-filament chemical vapor deposition (HFCVD) method. The structure and phase purity of an individual diamond nanocone are characterized by scanning electron microscopy (SEM) and micro-Raman spectroscopy. The result indicates that the diamond cones with hi...

متن کامل

Focused ion beam nano-structuring of photonic Bragg gratings in Al2O3 waveguides

Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integrated optical components such as waveguide amplifiers and lasers. Si-technology compatible low-loss Al2O3 channel waveguides grown on thermally oxidized silicon substrates have been reported recently. We used FIB milling for reflection grating definition on Al2O3 channel and ridge waveguides. Str...

متن کامل

Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering

Aluminum nitride (AlN) thin films have potential applications in microelectronic and optoelectronic devices. In this study, AlN thin films with different thicknesses were deposited on silicon substrate by single ion beam sputtering method. The X-ray diffraction (XRD) spectra revealed that the structure of films with thickness of - nm was amorphous, while the polycrystalline hexagonal AlN with a...

متن کامل

Atomic resolution top-down nanofabrication with low-current focused-ion-beam thinning

Techniques for scalable fabrication of one-dimensional or quasi-one-dimensional nanowires are of great importance to observe quantum size effects and build quantum information devices. In this work, we developed a technique for size reduction of both lateral and freestanding tungsten composite nanostructures using focused-ion-beam (FIB) thinning. Different exposure times and ion-beam currents w...

متن کامل

Optical temperature measurements on thin freestanding silicon membranes.

We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm(2) wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10(-3)/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Nanotechnology

دوره 23 10  شماره 

صفحات  -

تاریخ انتشار 2012